Interferometer
(ZYGO)
4in
∞~F5
Spectrometer
（USPM)
380nm～780nm
Reflectivity measurement
Spectrometer
（U4100)
280nm～2000nm
Reflectivity measurement
Passrate determination
Thermostat chambers
Warm and humidity test
-20~+100℃ 20~98%rh