Interferometer

Interferometer
(ZYGO)

4in
∞~F5

Spectrometer

Spectrometer
(USPM)

380nm~780nm
Reflectivity measurement

Spectrometer

Spectrometer
(U4100)

280nm~2000nm
Reflectivity measurement
Passrate determination

Thermostat chambers

Thermostat chambers

Warm and humidity test
-20~+100℃ 20~98%rh

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