Interferometer
(ZYGO)
4in
∞~F5
Spectrometer
(USPM)
380nm~780nm
Reflectivity measurement
Spectrometer
(U4100)
280nm~2000nm
Reflectivity measurement
Passrate determination
Thermostat chambers
Warm and humidity test
-20~+100℃ 20~98%rh